Linde starts up air-separation plant at Shanghai Huali Microelectronics

MOSCOW (MRC) -- Linde (Guildford, UK) hasВ announced it has started up a new air separation plant to supply nitrogen, high purity oxygen and argon to the 12-in. wafer product line of Shanghai Huali Microelectronics Corporation (HLMC) in Shanghaim reported Chemical Engineering. In addition, Linde will supply hydrogen and helium to HLMC.The new plant includes on-site nitrogen generators and

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